@article{KaemperPicardSchuetzeetal.2007, author = {Klaus-Peter K{\"a}mper and A. Picard and A. Sch{\"u}tze and D. Wallach}, title = {Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; K{\"a}mper, K.-P.; Sch{\"u}tze, A.; Wallach, D.; Walter, T.}, journal = {Mst-News (2006)}, pages = {15, 16 -- u. 35}, year = {2007}, }