TY  - JOUR
A1  - Lüth, H.
A1  - Thust, M.
A1  - Steffen, A.
A1  - Kordos, P.
A1  - Schöning, Michael Josef
T1  - Biochemical sensors with structured and porous silicon capacitors
T2  - Materials Science and Engineering B. 69-70 (2000)
Y1  - 2000
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1862
SN  - 0921-5107
SP  - 104
EP  - 108
ER  -