TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Crott, M.
A1  - Ronkel, F.
A1  - Thust, M.
A1  - Schultze, J. W.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Investigations on porous silicon layers with regard to chemical microsensor applications
T2  - Third International Conference on Intelligent Materials : Lyon, 3-4-5 June 1996, Center of Congress "L'Espace Tête d'Or" / [publ. by SPIE, the International Society for Optical Engineering]. General chair/ed. by: P. F. Gobin
Y1  - 1996
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1961
SN  - 0819421650
N1  - International Conference on Intelligent Materials ; (3, 1996, Lyon)
SP  - 275
EP  - 280
PB  - SPIE
CY  - Bellingham, Wash.
ER  -