TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Ehrfeld, W. A1 - Hagemann, B. T1 - Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H. T2 - Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey Y1 - 1995 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2878 SN - 1-85312-390-0 SP - 3 EP - 10 PB - Computational Mechanics Publ. CY - Southampton [u.a.] ER -