@article{KaemperLehrAbeletal.2007,
  author    = {Klaus-Peter K{\"a}mper and H. Lehr and S. Abel and J. D{\"o}pper},
  title     = {Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren f{\"u}r Mikroroboter / Lehr, H.; Abel, S.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulu, c.; Th{\"u}rigen, C.},
  journal   = {Proceedings of the SPIE - The International Society for Optical Engineering},
  pages     = {202 -- 210},
  year      = {2007},
}