@article{KaemperDoepperEhrfeldetal.2007, author = {Klaus-Peter K{\"a}mper and J. D{\"o}pper and W. Ehrfeld and B. Hagemann}, title = {Simulation supported design of LIGA Microsystems. K{\"a}mper, K.-P.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.}, journal = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, pages = {3 -- 10}, year = {2007}, }