@article{KaemperDoepperEhrfeldetal.2007, author = {Klaus-Peter K{\"a}mper and J. D{\"o}pper and W. Ehrfeld and S. Oberbeck}, title = {A self-filling low-cost membrane micropump}, journal = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division}, pages = {432 -- 437}, year = {2007}, }