@article{SchoeningNaetherAugeretal.2006, author = {Michael Josef Sch{\"o}ning and Niko N{\"a}ther and V. Auger and Arshak Poghossian and M. Koudelka-Hep}, title = {Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies}, journal = {Sensors and Actuators B. 108 (2005), H. 1-2}, pages = {986 -- 992}, year = {2006}, }