TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Hessel, V. A1 - Lacher, M. T1 - Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C. T2 - Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1 Y1 - 1997 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2887 SN - 0-7803-3664-X SP - 71 EP - 79 PB - IEEE Service Center CY - Piscataway, NJ ER -