@article{KaemperAbrahamEhrfeldetal.2007, author = {Klaus-Peter K{\"a}mper and M. Abraham and W. Ehrfeld and V. Hessel}, title = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.}, journal = {Microelectronic Engineering. 41-42 (1998)}, pages = {47 -- 52}, year = {2007}, }