@article{KaemperEhrfeldHesseletal.2007,
  author    = {Klaus-Peter K{\"a}mper and W. Ehrfeld and V. Hessel and M. Lacher},
  title     = {Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.},
  journal   = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1},
  pages     = {71 -- 79},
  year      = {2007},
}