TY - JOUR A1 - Kämper, Klaus-Peter A1 - Abraham, M. A1 - Ehrfeld, W. A1 - Hessel, V. T1 - Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A. T2 - Microelectronic Engineering. 41-42 (1998) Y1 - 1998 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2900 SN - 0167-9317 N1 - International Conference on Micro- and Nanofarbication SP - 47 EP - 52 ER -