TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Hagemann, B.
A1  - Lehr, H.
A1  - Michel, F.
T1  - LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C.
T2  - LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.
Y1  - 1995
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2910
N1  - University Enterprise Training Partnership for Micro-Electro-Mechanical Systems
SP  - 100
EP  - 110
PB  - FSRM
CY  - Neuchatel
ER  -