TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lehr, H.
A1  - Abel, S.
A1  - Ehrfeld, W.
T1  - Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Thürigen, C.
T2  - Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)
Y1  - 1995
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2872
N1  - 2nd Japan-France Congress on mechatronics (1994 Nov : Takamatsu, Japan)
SP  - 31
EP  - 31
PB  - Fuji Technology Press
ER  -