@article{KaemperLehrEhrfeldetal.2007,
  author    = {Klaus-Peter K{\"a}mper and H. Lehr and W. Ehrfeld and F. Michel},
  title     = {LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.; Schmidt, M.},
  journal   = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN},
  pages     = {43 -- 47},
  year      = {2007},
}