TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lehr, H.
A1  - Ehrfeld, W.
A1  - Michel, F.
T1  - LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M.
T2  - 1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN
Y1  - 1994
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2873
SN  - 0780321146
SP  - 43
EP  - 47
CY  - Piscataway, N.J.
ER  -