TY  - JOUR
A1  - Poghossian, Arshak
A1  - Wagner, Holger
A1  - Schöning, Michael Josef
T1  - Functional testing and characterisation of (bio-)chemical sensors on wafer level
T2  - Sensors and Actuators B: Chemical. 154 (2011), H. 2
Y1  - 2011
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/4367
SN  - 1873-3077
N1  - EUROSENSORS XXIII
SP  - 169
EP  - 173
PB  - Elsevier
CY  - Amsterdam
ER  -