@article{SchoeningSchaubZundeletal.2006, author = {Michael Josef Sch{\"o}ning and A. Schaub and A. Zundel and L. Beckers and J. Schubert and W. Zander and P. Kordos and H. L{\"u}th}, title = {Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors}, journal = {Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff}, pages = {601 -- 604}, year = {2006}, }