@article{KurowskiSchultzeLuethetal.2006,
  author    = {A. Kurowski and J.W. Schultze and H. L{\"u}th and Michael Josef Sch{\"o}ning},
  title     = {Micro- and nanopatterning of sensor chips by means of macroporous silicon},
  journal   = {Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.)},
  pages     = {640 -- 643},
  year      = {2006},
}