@article{SchoeningThustKordosetal.2006,
  author    = {Michael Josef Sch{\"o}ning and M. Thust and P. Kordos and J.W. Schultze and H. L{\"u}th},
  title     = {Capacitive microsensors for biochemical sensing based on porous silicon technology},
  journal   = {Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek},
  pages     = {1184 -- 1187},
  year      = {2006},
}