TY  - JOUR
A1  - Prume, Klaus
A1  - Muralt, Paul
A1  - Calame, Florian
A1  - Schmitz-Kempen, Thorsten
T1  - Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
T2  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/4070
SN  - 1385-3449
SP  - 407
EP  - 411
ER  -