TY  - JOUR
A1  - Prume, Klaus
A1  - Gerber, Peter
A1  - Kügeler, Carsten
A1  - Roelofs, Andreas
T1  - Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size  / Prume, K. ; Gerber, P. ; Kügeler, C. ; Roelofs, A. ; Böttger, U. ; Waser, R. ; Schmitz-Kempen,
Y1  - 2004
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/4048
SN  - 0-7803-8410-5
N1  - 14th IEEE International Symposium on  Applications of Ferroelectrics, 2004. ISAF-04. 2004
SP  - 7
EP  - 10
ER  -