@article{HagemannGeittnerWarnieretal.2007, author = {Hans-J{\"u}rgen Hagemann and P. Geittner and J. Warnier and F. Weling}, title = {Reduction of geometric taper losses in the PCVD process. Geittner, P.; Hagemann, H. J.; Warnier, J.; Weling, F.; Wilson, H.}, journal = {Electronics letters : an intern. publication / The Institution of Electrical Engineers. 21 (1985), H. 13}, pages = {870 -- 871}, year = {2007}, }