TY  - JOUR
A1  - Faßbender, F.
A1  - Schmitt, G.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Buß, G.
A1  - Schultze, J. W.
T1  - Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays
T2  - Sensors and Actuators B. 68 (2000), H. 1-3
Y1  - 2000
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1820
SN  - 0925-4005
SP  - 128
EP  - 133
ER  -