@article{FassbenderSchmittSchoeningetal.2006,
  author    = {F. Faßbender and G. Schmitt and Michael Josef Sch{\"o}ning and H. L{\"u}th and G. Buß and J. W. Schultze},
  title     = {Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays},
  journal   = {Sensors and Actuators B. 68 (2000), H. 1-3},
  pages     = {128 -- 133},
  year      = {2006},
}