TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Näther, Niko
A1  - Auger, V.
A1  - Poghossian, Arshak
A1  - Koudelka-Hep, M.
T1  - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies
T2  - Sensors and Actuators B. 108 (2005), H. 1-2
Y1  - 2005
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1723
SN  - 0925-4005
N1  - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004
SP  - 986
EP  - 992
ER  -