@inproceedings{SpannhakeSchulzHelwigetal.2006,
  author    = {Jan Spannhake and Olaf Schulz and Andreas Helwig and Angelika Krenkow and Gerhard M{\"u}ller and Theodor Doll},
  title     = {High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater materials},
  year      = {2006},
}