TY  - JOUR
A1  - Schöning, Michael Josef
T1  - Silicon-based biochemical sensors
T2  - CNI - The Center of Nanoelectronic Systems for Information Technology
Y1  - 2003
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/358
SP  - 165
EP  - 170
PB  - Foschungszentrum Jülich
ER  -