@article{HagemannGeittnerWarnieretal.2006,
  author    = {Hans-J{\"u}rgen Hagemann and P. Geittner and J. Warnier and H. Wilson},
  title     = {PCVD at high deposition rates. Geittner, P.; Hagemann, H. J.; Warnier, J.; Wilson, H.},
  journal   = {Journal of Lightwave Technology (J-LT) / Institute of Electrical and Electronics Engineers (IEEE). 4 (1986), H. 7},
  pages     = {818 -- 822},
  year      = {2006},
}