TY  - JOUR
A1  - Hagemann, Hans-Jürgen
A1  - Bachmann, P.K.
A1  - Lade, H.
A1  - Leers, D.
T1  - Diamond chemical vapor deposition: gas compositions and film properties / Bachmann, P.K.; Hagemann, H.-J.; Lade, H; Leers, D.; Picht, F.; Wiechert, D.U.; Wilson, H.
T2  - Diamond, SiC and nitride wide bandgap semiconductors : symposium held April 4 - 8, 1994, San Francisco, California, U.S.A. / ed.: Calvin H. Carter, Jr. ...
Y1  - 1994
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/708
SN  - 1-55899-239-1
N1  - Materials Research Society symposium proceedings ; 339
SP  - 267
EP  - 277
CY  - Pittsburgh, Penn.
ER  -