TY - JOUR A1 - Schöning, Michael Josef A1 - Kirchner, Patrick A1 - Ng, Yue Ann A1 - Spelthahn, Heiko A1 - Schneider, Andreas A1 - Henkel, Hartmut A1 - Friedrich, Peter A1 - Kolstad, Jens A1 - Berger, Jörg A1 - Keusgen, Michael T1 - Gas sensor investigation based on a catalytically activated thin-film thermopile for H2O2 detection T2 - Physica Status Solidi (A) N2 - In aseptic filling systems, hydrogen peroxide vapour is commonly used for the reduction of microbial contaminations in carton packages. In this process, the germicidal efficiency of the vapour depends especially on the H₂O₂ concentration. To monitor the H₂O₂ concentration, a calorimetric H₂O₂ gas sensor based on a catalytically activated thin-film thermopile is investigated. Two different sensor layouts, namely a circular and a linear form, as well as two various material pairs such as tungsten/nickel and gold/nickel, have been examined for the realization of a thin-film thermopile. Additionally, manganese oxide and palladium particles have been compared as responsive catalysts towards H₂O₂. The thin-film sensors have been investigated at various H₂O₂ concentrations, gas temperatures and flow rates. Y1 - 2010 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/3968 SN - 1862-6300 N1 - Special Issue: Engineering of Functional Interfaces EnFI 2009 VL - 207 IS - 4 SP - 787 EP - 792 PB - Wiley-VCH CY - Berlin ER -