TY  - CONF
A1  - Moritz, Werner
A1  - Yoshinobu, Tatsuo
A1  - Finger, Friedhelm
A1  - Krause, Steffi
A1  - Schöning, Michael Josef
T1  - Amorphous silicon as semiconductor material for high resolution LAPS
T2  - Eurosensors XVII : the 17th European Conference on Solid-State Transducers ; University of Minho, Guimarães, Portugal, September 21 - 24, 2003
Y1  - 2003
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/6852
SP  - 48
EP  - 49
ER  -