@article{FoersterCambelKicinetal.2006,
  author    = {Arnold F{\"o}rster and V. Cambel and S. Kicin and M. Kuliffayov{\´a}},
  title     = {Preparation of patterned GaAs structures for MEMS and MOEMS. Cambel, V.; Kicin, S.; Kuliffayov{\´a}, M.; Kov{\´a}cov{\´a}, E.; Nov{\´a}k, J.; Kostic, I.; F{\"o}rster, A.},
  journal   = {Materials Science and Engineering: C. 19 (2002), H. 2},
  pages     = {161 -- 165},
  year      = {2006},
}