@article{YoshinobuSchoeningFingeretal.2006, author = {T. Yoshinobu and Michael Josef Sch{\"o}ning and F. Finger and W. Moritz and H. Iwasaki}, title = {Fabrication of thin-film LAPS with amorphous silicon}, journal = {Sensors. 4 (2004), H. 10}, pages = {163 -- 169}, year = {2006}, }