@article{Mohnke2006,
  author    = {Andreas Mohnke},
  title     = {High-rate sputtering of zinc oxide with a funnel-shaped magnetic field: Effect of the target thickness on the layer properties},
  journal   = {Vakuum-Technik. 36 (1987), H. 5},
  pages     = {148 -- 151},
  year      = {2006},
}