TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Kordos, P.
A1  - Schultze, J.W.
A1  - Lüth, H.
T1  - Capacitive microsensors for biochemical sensing based on porous silicon technology
T2  - Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek
Y1  - 2000
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2029
N1  - International Conference on Solid State Sensors and Actuators <10, 1999, Sendai, Miyagi-ken> ; Transducers '99 ; (10 : ; 1999.06.07-10 : ; Sendai)
SP  - 1184
EP  - 1187
PB  - Elsevier
CY  - Amsterdam [u.a.]
ER  -