@article{PrumeMuraltCalameetal.2010,
  author    = {Klaus Prume and Paul Muralt and Florian Calame and Thorsten Schmitz-Kempen and Stephan Tiedke},
  title     = {Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;},
  journal   = {IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1},
  pages     = {81 -- 14},
  year      = {2010},
}