@article{MolinnusIkenJohnenetal.2022,
  author    = {Denise Molinnus and Heiko Iken and Anna Lynn Johnen and Benjamin Richstein and Lena Hellmich and Arshak Poghossian and Joachim Knoch and Michael Josef Sch{\"o}ning},
  title     = {Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition},
  journal   = {physica status solidi (a) applications and materials science},
  volume    = {219},
  number    = {8},
  doi       = {10.1002/pssa.202100660},
  year      = {2022},
}