TY - JOUR A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Schöning, Michael Josef T1 - Flow-velocity microsensors based on semiconductor field-effect structures T2 - Sensors. 3 (2003), H. 7 Y1 - 2003 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1780 SN - 1424-8220 SP - 202 EP - 212 ER -