@inproceedings{MertenKaemperBrilletal.2005,
  author    = {Sabine Merten and Klaus-Peter K{\"a}mper and Manfred Brill and Antoni Picard and Detlev Cassel and Andreas Jentsch and Markus Rollwa},
  title     = {Vom virtuellen Wafer zum realen Drucksensor},
  year      = {2005},
}