TY - JOUR A1 - Moritz, W. A1 - Yoshinobu, T. A1 - Finger, F. A1 - Krause, S. A1 - Martin-Fernandez, M. A1 - Schöning, Michael Josef T1 - High resolution LAPS using amorphous silicon as the semiconductor material T2 - Sensors and Actuators B. 103 (2004), H. 1-2 Y1 - 2004 UR - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/1696 SN - 0925-4005 SP - 436 EP - 444 ER -