@article{SchoeningKurowskiThustetal.2006, author = {Michael Josef Sch{\"o}ning and A. Kurowski and M. Thust and P. Kordos and J. W. Schultze and H. L{\"u}th}, title = {Capacitive microsensors for biochemical sensing on porous silicon technology}, journal = {Sensors and Actuators B. 64 (2000), H. 1-3}, pages = {59 -- 64}, year = {2006}, }