TY  - JOUR
A1  - Faßbender, F.
A1  - Schmitt, G.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Buß, G.
A1  - Schultze, J. W.
T1  - Passivation and corrosion of microsensor devices exemplified at microelectrode arrays
T2  - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.
Y1  - 1999
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2022
SN  - 90-76699-02-X
N1  - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague)
SP  - 953
EP  - 956
CY  - The Hague, The Netherlands
ER  -