@article{FoersterLayetLueth2007,
  author    = {Arnold F{\"o}rster and J. M. Layet and H. L{\"u}th},
  title     = {Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy},
  journal   = {Applied Surface Science. 41 - 42 (1989)},
  pages     = {306 -- 311},
  year      = {2007},
}