TY  - JOUR
A1  - Förster, Arnold
A1  - Layet, J. M.
A1  - Lüth, H.
T1  - Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy
T2  - Applied Surface Science. 41 - 42 (1989)
Y1  - 1989
UR  - https://opus.bibliothek.fh-aachen.de/opus4/frontdoor/index/index/docId/2729
SN  - 0169-4332
N1  - ISSN der E-Ausg.: 0169-4332
SP  - 306
EP  - 311
ER  -