@article{PrumeGerberKuegeleretal.2010,
  author    = {Klaus Prume and Peter Gerber and Carsten K{\"u}geler and Andreas Roelofs},
  title     = {Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; K{\"u}geler, C. ; Roelofs, A. ; B{\"o}ttger, U. ; Waser, R. ; Schmitz-Kempen,},
  pages     = {7 -- 10},
  year      = {2010},
}