@article{PrumeRaederTyholdtetal.2007,
  author    = {Prume, Klaus and Raeder, H. and Tyholdt, F. and Booij, W. E.},
  title     = {Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.},
  series = {Journal of Electroceramics. 19 (2007), H. 4},
  journal   = {Journal of Electroceramics. 19 (2007), H. 4},
  isbn      = {1385-3449},
  pages     = {357 -- 362},
  year      = {2007},
  language  = {en}
}