@article{FassbenderSchmittSchoeningetal.2000,
  author    = {Faßbender, F. and Schmitt, G. and Sch{\"o}ning, Michael Josef and L{\"u}th, H. and Buß, G. and Schultze, J. W.},
  title     = {Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays},
  series = {Sensors and Actuators B. 68 (2000), H. 1-3},
  journal   = {Sensors and Actuators B. 68 (2000), H. 1-3},
  isbn      = {0925-4005},
  pages     = {128 -- 133},
  year      = {2000},
  language  = {en}
}