@article{FoersterLueth1989,
  author    = {F{\"o}rster, Arnold and L{\"u}th, H.},
  title     = {Surface reactions of trimethylgallium and trimethylarsenic on silicon surfaces},
  series = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures. 7 (1989), H. 4},
  journal   = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures. 7 (1989), H. 4},
  isbn      = {1071-1023},
  pages     = {720 -- 724},
  year      = {1989},
  language  = {en}
}