@misc{Kaemper2008,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Lecture notes Sensors and Actuators WS 2008/2009},
  year      = {2008},
  abstract  = {Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter K{\"a}mper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index},
  subject      = {Sensor},
  language  = {en}
}
@article{Kaemper2002,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Die Mikroaktorik wird erwachsen},
  series = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)},
  journal   = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)},
  pages     = {4 -- 5},
  year      = {2002},
  language  = {de}
}
@article{Kaemper1996,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Development of low-cost injection moulded micropumps. Entwicklung von kosteng{\"u}nstigen, mittels Spritzguß hergestellten Mikropumpen / D{\"o}pper, J. (u.a.)},
  series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH},
  journal   = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH},
  address   = {Bremen},
  pages     = {37 -- 40},
  year      = {1996},
  language  = {en}
}
@article{Kaemper1994,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Fertigung von Mikroaktoren mittels LIGA-Technik. Lehr, H.; Abel, S.; Chritz, G.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.},
  series = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International},
  journal   = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International},
  address   = {Stuttgart},
  pages     = {getr. Z{\"a}hlung},
  year      = {1994},
  language  = {de}
}
@article{Kaemper1996,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Mikromontage zur Fertigung hybrider Mikrosysteme. Nienhaus, M.; Berg, U.; Ehrfeld, W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.},
  series = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996},
  journal   = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996},
  pages     = {121 -- 126},
  year      = {1996},
  language  = {de}
}
@article{Kaemper2003,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Education and Training in MST. K{\"a}mper, K.-P.; Picard, A.; Brill, M.; Cassel, D.; Jentsch, A.; Merten, S.; Rollwa, M.},
  series = {Mst-News (2003)},
  journal   = {Mst-News (2003)},
  isbn      = {0948-3128},
  pages     = {35},
  year      = {2003},
  language  = {en}
}
@misc{Kaemper2007,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Skript zur Vorlesung Mikrotechnik 1},
  year      = {2007},
  abstract  = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Sommersemester 2007. Version 2.3 vom 27.02.2007 I-8, 484 S.: Ill.; graph. Darst. Inhaltsverzeichnis: 1 Einf{\"u}hrung: Was ist Mikrotechnik? 2 Fertigung im Reinraum 3 Der Werkstoff Silizium 4 D{\"u}nnschichttechnologie 5 Photolithographie 6 {\"A}tztechnologie 7 „Bulk Micromachining" 8 „Surface Micromachining" 9 Trocken{\"a}tzen tiefer Mikrostrukturen 10 LIGA-Technik 11 Mikrofunkenerosion 12 Laser in der Mikrotechnik 13 Mechanische Mikrofertigung 14 Photostruktuierbares Glas 15 Aufbau- und Verbindungstechnik},
  subject      = {Mikrosystemtechnik},
  language  = {de}
}
@misc{Kaemper2007,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Lecture notes Sensors and Actuators},
  year      = {2007},
  abstract  = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format)},
  subject      = {Sensor},
  language  = {en}
}
@article{KaemperAbrahamHopster1992,
  author    = {K{\"a}mper, Klaus-Peter and Abraham, D. L. and Hopster, H.},
  title     = {Spin-polarized electron-energy-loss spectroscopy on epitaxial fcc Co layers on Cu(001)},
  series = {Physical Review B. 45 (1992), H. 24},
  journal   = {Physical Review B. 45 (1992), H. 24},
  isbn      = {1095-3795},
  pages     = {14335 -- 14346},
  year      = {1992},
  language  = {en}
}
@article{KaemperAbrahamEhrfeldetal.1998,
  author    = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.},
  title     = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.},
  series = {Microelectronic Engineering. 41-42 (1998)},
  journal   = {Microelectronic Engineering. 41-42 (1998)},
  isbn      = {0167-9317},
  pages     = {47 -- 52},
  year      = {1998},
  language  = {en}
}